Recent Advances in Micro-opto-electro-mechanical Systems (moems)
نویسنده
چکیده
MEMS-PIC is the ability to make different optical components using the Same fabrication process. Typical optical components for free-space oplical systems include (I) optical elcmenh, such as lenses, mirrors, refractive and diffractive optical elements, (2) three-dimensional optomechmical support, such mimr mount, and (3) movable s1Tuctures and actuators such as XYZ micropositionem. In the past several years, our research group at UCLA has been devcloping a MEMS Optical Bench technology that can simultaneously fabricale these three different tvoes of commnenis ushe the same fabrication mocess. Our fabrication Dmcess is h&\\erl on the s m J d polysiliron surface-mtcmniachining pmccs%s. Singlcship opticdl disk pickup Ihcad and tcmtosecond optical autoconclator hsvc been ~urcedul l ) dcmunsaird In this &k. &e will describe the receniadvances in Ootical MEMS devices for telecommunications and WDM applications. We will also discuss the main roadblocks and challenges for practical applications of MOEMS.
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